Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
The Effects of Deposition Conditions on the Micro-Surface Area of Sputtered SiC Films
Yoshihiro NEMOTO, Yuko HIROHATA, Tomoaki HINO, Toshiro YAMASHINA
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1990 Volume 33 Issue 3 Pages 124-127

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