マイクロイオンビーム分析装置の開発

抄録

A compact unclear microprobe system for RBS/PIXE with an overall size of 4.5m^L×2.5m^W×1.8m^H, has been created by aligning an accelerator, objective slits, an E×B filter and a doublet of the quadrupole magnet in a straight line. The beam line was designed to produce a collimation beam with a divergence of less than 0.01 degrees for channeling measurements, as well as microprobe with a spot size of about 1μm for micro RBS/PIXE measurements, achieved by merely adjusting the lens currents. The measuring chamber has a goniometer of our original design with four axes and a revolving disk head holding 30 samples for automatic sequential measurements. The combination of two beam modes and two sample manipulators makes the system versatile.