Deposition of BaTiO₃ Thin Films by ArF Excimer Laser Ablation

Abstract

BaTiO₃ films have been deposited on a quartz substrate at various substrate temperatures by the ArF excimer laser ablation technique. Crystallization of the film deposited at substrate temperatures as low as 300°C was confirmed by X-ray diffraction analysis. The expansion velocities of the laser plume and the ablated species in the plume have also been investigated by time-resolved optical observation and spectroscopy.