Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Cylindrical Magnetron Sputtering for Coating Titanium Films on Copper Wires
Tadao KANEKO, Mieko SAKURAI, Osamu NITTONO
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1994 Volume 37 Issue 8 Pages 639-643

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