Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
Development of Bakeable-type Cryopump with Regenerator-separated GM Cooling System
Hiroki OHZORA, Yutaka MATSUI, Shinji FURUYA, Kenji ARASAWA
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1995 Volume 38 Issue 3 Pages 117-120

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