マグネトロンスパッタ法を用いたカーボンナノチューブの直径及び密度制御

抄録

We have succeeded in controlling density and diameter of the carbon nanotubes (CNTs) prepared by RF magnetron sputtering. The catalytic Ni particles on the substrates were prepared by dipping the Ni film on the substrates into hydlofluoric acid (HF). The density and diameter of the particles were changed with varying HF treatment times. There was correlation between the particle size and the nanotube diameter. The particles could be working as nucleation seeds of carbon nanotubes.