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Online ISSN : 1880-9413
Print ISSN : 0559-8516
直流プラズマ化学気相堆積法によるカーボンナノチューブの成長とその電界電子放出特性
古賀 瑞帆上田 啓介林 康明西野 茂弘
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46 巻 (2003) 5 号 p. 412-415

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Carbon nanotubes were synthesized by hot filament assisted direct current plasma enhanced chemical vapor deposition (HF/DC-P CVD) in CH4/H2 plasmas. Well-aligned and high density carbon nanotubes were grown. By I-V characteristics and SEM images, it was found that there is a close relation between well-aligned carbon nanotubes and field emission properties. It was also found by the F-N plot of I-V characteristics that the current is due to the tunnelling effect and there are no relations between the feld enhancement factor and the diameter of carbon nanotubes for the grown carbon nanotubes.

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