Growth Control of Carbon Nanotubes using the Laser Irradiation Effect

Abstract

We have investigated laser irradiation effects on the growth of carbon nanotube (CNT) on 6H-SiC (0001) surfaces. High-alignment CNT was vertically formed on a 6H-SiC (0001) surface by annealing the substrate at 1700°Cin a vacuum, without laser-irradiation. However, an amorphous carbon layer was formed on the 6H-SiC (0001) surface and the CNT growth was suppressed when the surface was treated by the ArF excimer laser with about 0.01 J/cm² for 5 min in air before being annealed. Samples were analyzed by transmission electron microscopy and electron diffraction.