真空
Online ISSN : 1880-9413
Print ISSN : 0559-8516
真空アーク蒸着法によるダイヤモンド様炭素成膜における巨視的プロセス特性の陰極素材依存性
南澤 伸司宮川 伸秀滝川 浩史榊原 建樹窪島 隆一郎椎名 祐一
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47 巻 (2004) 3 号 p. 200-203

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Macroscopic process parameters of arc voltage, cathode erosion rate, droplet emission rate, ion current, and deposition rate were measured in T-shape filtered cathodic arc deposition using various kinds of carbon cathode materials. Strong correlation between deposition rate and ion current was found. When the ion current was higher, the deposition rate was higher. However, the higher cathode erosion rate did not always brought the higher ion current, and the droplet emission rate was mildly tended to increase as the ion current increased. As a comprehensive evaluation, the optimum cathode material in the present study was considered to be pure graphite. However, the materials of carbon graphite and that including Si hardly emitted the droplets, suggesting the future possibility of the development of droplet-free carbon cathode material.

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