Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
速報
ポリエステルフィルム上に成膜した金属蒸着膜の引張特性と密着性
北 拓也斉藤 翔岩森 暁
著者情報
ジャーナル フリー

2008 年 51 巻 3 号 p. 205-207

詳細
抄録

  Four kinds of metal, such as aluminum, copper, indium and tin, thin films were deposited onto polyester (PET) substrate by a conventional vacuum evaporator and evaluated their tensile and adhesion properties. The tensile property was estimated by observations of micro-cracks of the thin films due to the tensile test at 150°C. The tensile property of the metal thin films seems to relate with Brinell hardness and thickness of the thin film. The adhesion property of these metal thin films was estimated by measuring the pull strength. Aluminum thin film showed highest pull strength of all the thin films, and the pull strength increased with increase of the thickness.

著者関連情報
© 2008 一般社団法人日本真空学会
前の記事 次の記事
feedback
Top