半球形阻止電界型エネルギー分析器を用いたシリコン電界放出電子源のエネルギー分析

抄録

  Energy distribution of n-type silicon field emitter array (Si-FEA) was measured with a hemispherical collector. Adjusting the position, the energy spread and the peak shift of the FEA were lower than those without alignment. The peak shift and wide energy spread became larger with an increase in the extraction voltage or emission current. Some possible reasons of the peak shift and energy spread were discussed.