Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
竹田 将利栗巣 普揮内田 貴志山本 節夫石澤 克修野村 健江田 庸宏村重 信之
ジャーナル フリー

2010 年 53 巻 3 号 p. 136-139


  This paper addresses the development of the surface finishing for a titanium material and the study for the reduction of outgassing property of adsorbed water (H2O) molecules. Developed surface finishing is composed of the buffing for the reduction of the surface roughness and improved chemical polishing for the thick surface oxide layer compared with the chemical polishing so far. The surface roughness of the surface finished titanium material is reduced 35% and the thickness of the surface oxide layer increases by 30%. The total amount of thermal desorbed H2O gas for the new surface finished titanium is reduced 30%. It is considered that the origin for the decrease of the amount of desorption H2O gas is the reduction of the adsorption sites due to the decrease of the surface roughness and the reduction of adsorption energy of H2O gas due to the strong surface oxidation for a titanium material.

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