It is the purpose of this report to fabricate transparent conducting multilayered films with anti-heat properties using ZnO as the chief ingredient. The multilayered films are composed of ATO (1.0 wt.% Sb2O3 doped tin oxide)/AZO (1.5 wt.% Al2O3 doped zinc oxide) structure. After the fabrication process, a test of anti-heat properties was carried out at 500°C for 24 hours. Electrical and optical properties were compared before or after the test of anti-heat properties. In this report, favorable experimental results are described.
