2012 年 55 巻 8 号 p. 403-404
We constructed a simple atomic hydrogen source mounted on a conflat flange with an outer diameter of 70 mm (CF70). The source consists of a tungsten filament, a hydrogen gas inlet, and two feedthroughs. The filament is surrounded by a CF70 nipple made of 0.2% beryllium copper alloy and oxygen-free cupper gaskets to reduce the outgassing rate. Using this hydrogen source, we hydrogenated a clean Si(111)-7×7 surface at room temperature. Low energy electron diffraction patterns and Auger electron spectra were measured before and after the hydrogenation.
