排気と真空ポンプ

抄録

  Presented here are the fundamental concepts of evacuation process and the key features of various vacuum pumps. Several essential terms, including evacuation time constant, pumping speed and conductance, are introduced to help the understanding of evacuation mechanism and to enable the design of vacuum systems. The vacuum pumps are systematically classified with their operating principles, structures and characteristics. It will help readers to select the proper vacuum pumps and to realize the reasonable vacuum system in different situations.