Vacuum chambers, components and related systems consist of various materials according to requiring material performance. Austenitic stainless steels have been used for vacuum chambers due to high mechanical strength, anti-corrosion and low outgassing. Aluminum alloy have been used for special vacuum systems such as particle accelerator due to non-magnetism and low radioactivation. Copper has been used for flange gasket due to good ductility. Ceramics have been used for components of electrical insulator, high temperature system and so on due to good stability under harsh environments. Organic materials are less used due to their high outgassing rate compared with inorganic materials. It is important to select and put the right material in the right place in a vacuum system.
