Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
講座
プラズマの基礎
中野 武雄
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ジャーナル フリー

2014 年 57 巻 8 号 p. 308-312

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  Discharge plasma, especially that generated at low gas pressures, is an important application of vacuum technology. This article describes the unique features of low gas pressure plasma, generation of plasma discharge and various plasma parameters. Plasma-wall interaction, which is very important for many plasma-related technologies, is also discussed considering the collisionless sheath model.

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© 2014 一般社団法人日本真空学会
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