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Journal of the Vacuum Society of Japan
Vol. 57 (2014) No. 8 p. 308-312

記事言語:

http://doi.org/10.3131/jvsj2.57.308

講座

  Discharge plasma, especially that generated at low gas pressures, is an important application of vacuum technology. This article describes the unique features of low gas pressure plasma, generation of plasma discharge and various plasma parameters. Plasma-wall interaction, which is very important for many plasma-related technologies, is also discussed considering the collisionless sheath model.

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