Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
講座
測定学から見た真空計測の基礎 (2) 真空計測で用いられる計測用語(つづき)
吉田 肇
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2015 年 58 巻 4 号 p. 155-161

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  This second lecture of “Basics of Vacuum measurement from viewpoint of Metrology” gives the concise explanation of the technical terms related to the pressure measurement such as a zero point, an offset, a residual current, a linearity, and so on. A calibration result of a hot-cathode ionization gauge is shown as an example. A difference between a calibration and an adjustment is also explained. Benefits of calibration are discussed.

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© 2015 一般社団法人日本真空学会
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