Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
Lecture
Vacuum Components and Movable Mechanism
Akiko N. ITAKURA
Author information
JOURNALS FREE ACCESS

2015 Volume 58 Issue 8 Pages 282-291

Details
Abstract

  The vacuum components are important components to be used at the boundary of the atmosphere and vacuum, because a vacuum system is not assembled just with the vacuum vessel and the vacuum pumps.
  The basic technique is a vacuum sealing technique of how to prevent leakage of the atmosphere. I explain vacuum seal technology and vacuum parts as applied technology, flanges, valves, vacuum current feedthrough, and the optical window. Movable mechanisms in vacuum are described, too.

Information related to the author
© 2015 The Vacuum Society of Japan
Previous article Next article
feedback
Top