真空技術における潜在的な危険と安全対策

抄録

 In this article, potential dangers of vacuum technologies are revealed, and safety measures for these dangers have been suggested. These dangers include considerable difference between the vessels' inner and outer pressures, condensation of flammable gases to the pump, electric shock due to a high voltage or electric leakage, involution to mechanical motion, touching of a high temperature during baking. Furthermore, many dangers exist when the system is under repair or maintenance. In addition to the vacuum system itself, the materials used for its operation such as liquid cryogen and organic solvents are more hazardous. Finally, some of the safety measures are proposed for the aforementioned dangers.