技術紹介
PIGプラズマCVD法によるダイヤモンドライクカーボン薄膜の作製
2017 年 60 巻 3 号 p. 85-91
詳細
2017 年 60 巻 3 号 p. 85-91
We have developed PIG plasma CVD to the product stage as a practical system for producing diamond-like carbon (DLC) layers by applying a hot cathode Penning Ionization Gauge (PIG) ion source that can easily obtain a high-density plasma for plasma CVD. DLC layers produced by this system have a high deposition density and adhesion. A special feature is that both a low friction characteristic and resistance to wear are achieved by film nanomultilayering. This paper describes the system and reports tribological characteristics of the film.
To measure the friction reducing effect in oil, we also developed a new arc discharge magnetron sputtering system. A carbon nitride (CNx) layer produced with that system has a coefficient of friction that is 40% or more lower than DLC produced by conventional CVD methods. That result is also reported.
