解説
表面処理のための大気圧直線型マイクロ波プラズマ
2017 年 60 巻 3 号 p. 105-111
詳細
2017 年 60 巻 3 号 p. 105-111
Atmospheric pressure plasma is a powerful tool for various material processing. In this article, development of atmospheric pressure plasmas are reviewed, particularly for glow-like plasma which is characterized by spreading in space and has an advantage applicable to surface treatment. One important issue in application of atmospheric pressure plasma is a large area processing, and as one candidate for the purpose, line-shaped microwave plasma in atmospheric pressure is also reviewed.
