Active oxygen species (AOS) generated via ultraviolet lamps can be applied for various industrial processes owing to extremely strong oxidative abilities. It is well known that excited singlet oxygen atom [O(1D)], excited oxygen molecule (1O2), ozone (O3) and hydroxyl radicals (OH*), are of interest and value in surface modification, cleaning and oxidation processes. We have been investigated a new sterilization method using the AOS, and it is important to evaluate damages of polymer devices due to the exposure of the AOS for using as a sterilization apparatus. In this paper, we evaluated degradation behaviors of polymers used for medical devices due to the exposure of the AOS by using a colorimeter, spectrometer and pull test apparatus. We found that these polymer characteristics as bulk materials were maintained, although those of the surfaces were deteriorated by the AOS exposure.