Efficient data handling in X-ray standing wave imaging

抄録

A novel technique of X-ray standing wave imaging was newly developed for investigating the impurity depth profiles at all different parts of a nanolayer material. For only one sample, the technique produces large amounts of experimental data and one piece of data encodes the impurity depth profile at one part. It is extremely laborious to process the data one by one. For this reason, the present paper proposes an efficient data handling method of feature mapping. It extracts the key feature of every piece of data and displays all of them in one feature map. In this way, the information on the impurity depth profiles at all different parts of the sample can be simultaneously processed. In this report, the physical principle of feature selection is demonstrated. The noise robustness of the method is also discussed.