Development of a scanning nanopipette probe microscope capable of irradiating atmospheric pressure plasma jets

Abstract

Atmospheric pressure plasma jets are expected to have many applications such as surface modification, sterilization, and medical treatment, and have been actively studied in recent years. The plasma jet is expected to be applied to the fabrication of microdevices such as MEMS because of its potential to realize microfabrication by localizing the plasma irradiation area. We have been developing an atmospheric pressure plasma jet micromachining system using a scanning probe microscope (SPM). In this presentation, we will introduce various fabrication methods using this SPM system.