日本表面真空学会学術講演会要旨集
Online ISSN : 2434-8589
Annual Meeting of the Japan Society of Vacuum and Surface Science 2023
セッションID: 1P31
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October 31, 2023
Self-sustained electrical oscillations of VO2-based planar devices and their coupled oscillation phenomena
Junpei KidokoroKunio OkimuraLamisa HoqueSuruz Md MianToshihiro Nakanishi
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Vanadium dioxide (VO2) shows a sharp insulator-metal transition (IMT) with resistance change over 4 orders at around 68°C concomitant with a structural phase transition (SPT). The VO2 film also shows rapid decrease in resistance with current jump when certain voltage is applied between facing electrodes on the film. This current jump possesses a negative resistance region, resulting in the phenomenon of self-sustained oscillation. Self-sustained oscillation is expected to be applied to neuromorphic devices1). Further, it is known that parallel connection of self-sustained oscillators realizes coupled oscillation, in which their phases are automatically synchronized 2,3). The coupled oscillations are expected to be applied to various issues in mathematical engineering field, such as graph coloring problem. 4) In this study, the coupled oscillation was successfully demonstrated in a planar device with two self-oscillation circuits. VO2 film was reactively sputtered on Al2O3 (001) substrate with size of 20 × 20 mm2 at 400℃. The VO2 film with thickness of 100 nm showed IMT with resistance change over three orders. As electrodes, 10 nm-thick Ti was coated on the VO2 film followed by 200 nm-thick Au deposition. In the planar electrodes, the width and the gap were 5000 μm and 10 μm, respectively, as shown in Fig. 1. In order to investigate the coupled oscillation, self-oscillation circuits were composed between 2 and 3, and between 3 and 4, respectively. The two self-oscillation circuits were connected with a 22 nF-capacitor as shown in Fig. 2. Through this capacitance, two circuits interact each other and adjust their phases automatically. An AC voltage was supplied through an internal resistance of 1 kΩ by using curve tracer (Kokusai Denki Co. Ltd.). In the experimental results, anti-phase synchronization of two oscillating waves, in which voltage across VO2 (2 - 3) rose during off period of voltage (3-4), was found as shown in Fig. 3. Thus, cooperative oscillation was realized in the coupling of two oscillators. Coupled oscillation frequency was around 10 kHz at a capacitance of 22 nF. The anti-phase synchronization appeared at the supply voltage from 100 to 92 V, and the amplitude between minimum and maximum values was 12.8V. In the present study, we directly observed changes of coupling mode by using curve tracer. In the presentation, we will show minute results of synchronization of two oscillators. References 1)Liu et al., J. Appl. Phys., 120, 124102 (2016). 2) M. S. Mian et al., J. Appl. Phys., 117, 215305 (2015). 3) Tobe et al., J. Appl. Phys., 127, 195103 (2020). 4) A.Parihar et al. Sci.Rep. 7, 911 (2017).

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