Preprints of the National Meeting of JWS
the national meeting 2008 spring
Session ID : 310
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Host: Japan Welding Society

Preparation of (BaSr)TiO3 thin films by chemical solution deposition
*Min SHI, Zhanjie WANG, Hiroyuki KOKAWA
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Keywords: BST thin films, chemical solution deposition, microstructure, electrical property
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Abstract
In this study, (BaSr)TiO3 (BST) thin films were deposited by chemical solution deposition (CSD) on Pt/Ti/SiO2/Si substrate. The crystalline phase, microstructure and electrical properties of the BST thin films were investigated and the effects of processing on the crystalline phase, Microstructure and electrical properties were discussed.
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© 2008 by Japan Welding Society
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