1995 Volume 21 Issue 6 Pages 1015-1023
Aluminum-supported Molybdenum carbide was prepared using a vertical tube hot-wall CVD reactor at a temperature of 500°C800°C and 0.070.21 kPa total pressure. Amorphous molybdenum carbide was formed on a quartz plate in the range of 500°C-700°C, and Mo3C2 crystals were formed above 700°C. Conformal step cover-age on micro-trenches was obtained at a pressure of 0.07 kPa. The hydrogenation of CO2 was carried out at a reaction temperature of 400°C and 0.1 MPa total pressure. The main reaction products were CO and H2O and the selectivity to CO was above 99%. CVD carbide catalysts were 3 and 15 times more active per molybdenum loading than impregnated carburized and reduced catalysts, respectively.