KAGAKU KOGAKU RONBUNSHU
Online ISSN : 1349-9203
Print ISSN : 0386-216X
ISSN-L : 0386-216X
Effect of O2 on Formation of Ar-O2 RF Plasma
ISAO MATSUI
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2000 Volume 26 Issue 6 Pages 792-797

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Abstract

The effect of gas composition on the plasma structure is investigated using a self consistent continuous fluid plasma model, which assumes that the local field approximation is attained in the RF plasma. Boltzmann analysis was performed for the estimation of swarm parameters for the various amount of O2 containing Ar, where the oxygen content was from 1% to 100%. Positive ion density, negative ion density and electron density in the Ar/O2 mixture 1D rf plasma are calculated using a self -consistent continuous fluid plasma model. Though the calculation results show that swarm parameter is not greatly affected by the amount of oxygen, the plasma structure is drastically changed even for the 1% oxygen containing. It was concluded that negative ion in the oxygen plasma play an important role in the mixture gas plasma structure, and the analysis for the mixture processing gas should be done by paying attention to negative charged particles formation in the plasma.

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© by THE SOCIETY OF CHEMICAL ENGINEERS, JAPAN
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