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Online ISSN : 2434-2386
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Development of Analytical Electron Microscope Attached with a Microcalorimeter-type EDS
—Current State and Future Development—
Toru HaraKeiichi TanakaKeisuke MaehataKazuhisa MitsudaNoriko YamasakiMitsuaki OhsakiShigemasa OhtaKatsuaki WatanabeXiuzhen YuYoshihiro YamanakaTakuji Ito
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2009 Volume 44 Issue 4 Pages 289-291

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Abstract

A high energy-resolution energy dispersive spectrometer (EDS) utilizing a transition-edge-sensor (TES) microcalorimeter is developed for a transmission electron microscope (TEM). As the first step, we have attached a single-pixel TES system cooled by the cryogen-free cooling system to the TEM and obtained an energy resolution of 7.6eV at silicon Kα line without degrading the spatial resolution of the TEM.

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© 2009 The Japanese Society of Microscopy
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