KENBIKYO
Online ISSN : 2434-2386
Print ISSN : 1349-0958
Researches Today
Low Energy Scanning Electron Microscope Mounted with a Single-atom Electron Source
Naoki ChiyodaTsuyoshi IshikawaBokurai ChoAkira YonezawaHidekazu SaitoMakoto KandaChuhei Oshima
Author information
JOURNALS FREE ACCESS

2010 Volume 45 Issue 2 Pages 133-136

Details
Abstract

Present situation of developing low-energy SEM mounted with a single-atom electron source has been reviewed. In the electron gun, adjustment of direction alignment of an electron beam is possible in addition to the adjustment of beam position. The highly efficient electron gun was realized; SEM observation was realized at several nA of the total emission current, which is three orders of magnitude as small as those of conventional FE guns. Improvement in the spatial resolution is in progress.

Information related to the author
© 2010 The Japanese Society of Microscopy
Previous article Next article
feedback
Top