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Online ISSN : 2434-2386
Print ISSN : 1349-0958
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Delta Type Spherical Aberration Corrector
Hidetaka SawadaTakeo SasakiShuuichi YuasaMitsuhisa TeraoMuneyuki KawazoeTomohiro NakamichiFumio HosokawaToshikatsu KaneyamaYukihito KondoKoji KimotoKazutomo Suenaga
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2010 Volume 45 Issue 3 Pages 193-197

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Abstract

We have developed a spherical aberration correction system with three dodeca-poles. This system corrects a six-fold astigmatism, which generally limits a uniform phase area for image forming and probe forming system in an electron microscope with the conventional two-hexapole corrector. Experimental results showed compensation of a six-fold astigmatism as well as spherical aberration. We experimentally demonstrated high-resolution images with this corrector in a transmission electron microscope and a scanning transmission electron microscope at 30-kV and 60-kV acceleration.

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© 2010 The Japanese Society of Microscopy
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