2010 Volume 45 Issue 3 Pages 193-197
We have developed a spherical aberration correction system with three dodeca-poles. This system corrects a six-fold astigmatism, which generally limits a uniform phase area for image forming and probe forming system in an electron microscope with the conventional two-hexapole corrector. Experimental results showed compensation of a six-fold astigmatism as well as spherical aberration. We experimentally demonstrated high-resolution images with this corrector in a transmission electron microscope and a scanning transmission electron microscope at 30-kV and 60-kV acceleration.