Atomic Resolution EDS Mapping by Cs-Corrected STEM-EDS

Abstract

Study of Atomic-column EELS mapping by using Cs-corrected STEM was reported by many groups. Atomic resolution EELS maps have been used to determine positions and species of atoms or atomic columns. On the other hand, atomic-column EDS mapping has not been attempted, because x-ray signal collection efficiency become 100 times worse than EELS. Recently, newly large sensor (100mm²) Silicon-Drift type X-ray detector (SDD) was developed for the improvement of signal collection efficiency. This paper reported result of atomic-column EDS mapping from several Oxide specimen by using large solid angle SD-detector with Cs-corrected STEM.