Specimen Preparation Techniques Using Focused Ion Beam Systems

Abstract

Basic configuration and functions of a focused ion beam (FIB) system will be introduced. Basic preparation techniques for transmission electron microscopy (TEM) specimens using FIB systems will be explained. In addition, some TEM images of specimens prepared by such the FIB technique are presented. I hope that this paper will be useful for engineers and researchers who will use FIB systems in near future.