AFM-Raman and Its Application

Abstract

Since Raman spectroscopy can measure sample composition, crystallinity, stress, etc. without contact, its application is expanding in various fields. Raman scattering was discovered by Dr. Raman of India in 1928. After improvement of the excitation source and optical system, the Raman microscope was developed by integrating with a microscope and commercially released for the first time in the 1970s. By combining with a microscope, Raman spectrum measurement with sub-μm order spatial resolution became possible. In recent years, there has been an increasing need for measurement of spatial resolution on a nanoscale that exceeds the diffraction limit. A high spatial resolution measurement technique that utilizes the Raman enhancement effect by near-field is developed. In this paper, we introduce the AFM-Raman which integrates a Raman microscope, and atomic force microscope (AFM), which enables spatial resolution of nanoscale by Tip-Enhanced Raman spectroscopy (TERS).