Low-dose Atomic-resolution Imaging Using OBF STEM

Abstract

Scanning transmission electron microscopy (STEM) enables us to directly visualize atomic structures inside materials. However, atomic-scale observation of electron beam-sensitive materials has been extremely challenging because of their low resistance to electron irradiation. We have developed an ultra-efficient STEM imaging method, optimum bright-field (OBF) STEM, utilizing segmented STEM detectors. The OBF technique has much higher imaging efficiency than conventional STEM methods and can be applied to low-dose imaging of beam-sensitive materials with minimal irradiation damages. This paper introduces the imaging theory of OBF STEM and its application to various samples including lithium-ion battery materials.