光音響法の円弧状表面欠陥検出への応用

抄録

The estimation of surface defect shape has been demonstrated by photoacoustic (PA) microscope using specimen with an artificially made surface defect. The shape of the defect introduced for measurement is arc with a number of aspect ratio. Furthermore, in order to establish PA signal dependence on defect depth, a simulated defect the depth of which is linearly increasing is fabricated on a metal plate by mechanical processing. The results show that imaging of defects by PA microscopy enable precise determination of both location of edges and configuration of the defect.