レーザプラズマ誘起蛍光を用いたガス圧力の高感度計測

抄録

A highly-sensitive technique for gas pressure measurement has been developed using laser-induced plasma fluorescence. ArF laser light of 193nm is focused into CF₃I/Aγ gas mixture, where Ar is ionized by the 3-photon absorption. A highly pressure-dependent fluorescence intensity is obtained which originates from the 3-body reaction of Aγ⁺₂, Aγ₂ and Aγ₂ with two Ar atoms. Pressure fluctuation in a turbulent jet is measured applying the present method. Pressure fluctuation beyond the instrumental noise level can be measured, where the instrumental noise level is 0.5 percent of the total pressure.