TiN薄膜モールドを用いたナノインプリント法と焼鈍法による規則的金属ナノドットアレイの効率的創製

抄録

A new efficient fabrication method for an ordered metal nanodot array is developed by coupling nanoimprint method with a TiN thin-film mold and self-assembly of a metal thin-film due to thermal annealing. In this study, in order to develop a thin-film mold which possesses sufficient hardness and durability to use in the nanoimprint, we fabricate a TiN thin-film mold by the nano plastic forming, sputtering and electroplating processes. Using the fabrication method, TiN thin-film molds with different nanoscale surface structures can be developed. Furthermore, we demonstrate that the lattice- and parallel-patterned grooves can be formed on a gold thin-film by the nanoimprint with the developed TiN thin-film molds. It is found that a well-ordered gold nanodot array can be efficiently fabricated on a quartz glass substrate by annealing the gold thin-film formed by the nanoimprint.