真空ポンプ機能を持つレーザスキャナ用動圧形空気軸受 : ポンピング特性の理論解析

抄録

This paper treats the pumping characteristics of a herring-bone grooved gas journal bearing when this bearing is used as a viscous vacuum pump in order to reduce windage power losses of a laser scanner mirror. In the theoretical analysis, the Reynolds equation for a herring-bone gas journal is derived, considering the effect of slip flow. The optimum design method for a vacuum pump is discussed by showing the influences of various design parameters on the pumping characteristics. It is consequently shown that this type of bearing functions well as a vacuum pump and is very useful for the reduction of windage power losses of the laser scanner mirror.