62 巻 (1996) 594 号 p. 677-682
This work concerns the development of a manufacturing technique for three-dimensional micromechanical parts. The micromechanical parts or micromolds are made by writing with a focused UV laser beam on the surface of a liquid photopolymer. At this time the irradiated portion of the liquid photopolymer becomes solid. Three- dimensional solidified polymer structures are then obtained by stacking the two- dimensional polymer structures. In this paper we theoretically examine the effect of absorption of light in a photopolylmer and exposure factors such as beam power and writing speed on the shape of the solidified polymer. The optimum conditions for three-dimensional micromechanical parts are also determined. Using these conditions, three-dimensional micropolymer structures are formed. The shapes obtained by stacking two-dimensional polymer structures are also examined.