63 巻 (1997) 611 号 p. 2570-2575
Loose abrasives that are attracted to an electrode surface by an electrophoretic phenomenon should be fixed on an electrode suface to increase the machining efficiency. An anodic film that possesses the characteristic to grow continuously under the process of anodization of an aluminum alloy was employed as a binder of ultrafine silica abrasives. The effect of grain density, grain size, pH and chlorine ion density in the polishing fluid on the generation of the anodic film and the polishing efficiency was examined through the polishing test on a partially stabilized zirconia ceramic. It was revealed that the porous anodic film that was generated where the growth velocity of the anodic film was balanced with the erosion velocity of the barrier film could be used as the binder of loose abrasives. Also, it was confirmed that swarf loading decreased with increasing pore size of the anodic film so that the polishing efficiency increased with increasing pore size of the anodic film.