ソフトウェア電荷制御による圧電アクチュエータの軌跡追従制御

抄録

Hysteresis characteristics between the applied voltage and the displacement of the element is a big problem in tracking control of piezoelectric actuators whether position feedback is available or not. In this paper, we propose a new method to compensate such hysteresis taking notice of the linearlity between the displacement and the total charge on the piezoelectric element. We'd like to call this method' softwared charge control' in the sense that no hardware equipments are used in contrast to the conventional charge control.