エアミスト加工液による振動外周刃スライシングに関する基礎研究

抄録

This paper proposes a new slicing technique with OD-Blade that can improve the machining efficiency and accuracy, and make a remarkable decrease in quantity of the working fluid compared with the conventional slicing method. In order to accomplish these requirements, authors have developed the vibration slicing method with the atomized working fluid and executed the fundamen- tal considerations. The results obtained from experimental and theoretical considerations as to this method are noted as follows: (1) When the flow velocity of the atomized working fluid increases, the grinding force shows decrease regardless of the non-vibration and the vibration slicing methods. (2) The wafer roughness and the chipping produced in the edge of the slicing groove as the machining accuracy are equal to the conventional supply method of the working fluid when supplying the atomized working fluid. (3) It is possible for the vibration slicing method with the atomized working fluid to bring out the decrease effect in the waste water.