圧力,温度および横ひずみ感度を低減した薄膜ひずみセンサの開発に関する研究(機械要素,潤滑,工作,生産管理など)

抄録

In order to measure correctly the strain distribution on sliding surfaces of machines, the strain sensor should react only to the strain to be measured. Thus, the sensor should be insensitive not only to pressure, temperature, transverse strain and must be made to meet requirements regarding small size. In this research, we developed a small sputtered thin-film strain sensor with negligible sensitivity to pressure and temperature by properly proportioning the sensor constituents with a Ni-Cr-Al alloy. In addition, by implementing an L-shaped sensor in an appropriate size, a transverse strain sensitivity of zero was achieved.