2004 年 70 巻 690 号 p. 547-553
Recently, in the field of machine tool, measuring instrument, robot, medical industry, information processing and so on, many miniature structures are used for high precision or many functions. When machine structure becomes small, the influence of the surface area becomes larger than that of the volume. For example, in the case of the micro-machine, mass of the machine becomes small in proportion to the cube, but surface area of the machine only becomes small in proportion to the square, and frictional force or air resistance which are very influenced by surface area become the factor of the unstable behavior. Therefore, the control of the coefficient of friction between the sliding parts is an important factor for stable behavior of the machine. And standard deviation of coefficient of friction was also an important factor. In this study, relationships between specifications of the sliding surface of a minute part and the coefficient of friction or its standard deviation were investigated in experiment. Photo-fabrication for final treatment on the sliding surface were used. At first, relationship between friction and some environment conditions was investigated. Then relationship between friction and specifications of sliding surface was measured. In addition, a neural network for designing specifications of sliding surface with the desired coefficient of friction was builded up and evaluated. It is concluded from the results that (1) Coefficient of friction was changed only 0.03 by some environment conditions, (2) Relationship between the specifications of the sliding surface and the coefficient of friction was declared, (3) The sliding surface with the desired coefficient of friction was designed by inverse analysis using neural network.