日本機械学会論文集 C編
Online ISSN : 1884-8354
Print ISSN : 0387-5024
エリプソメトリー顕微鏡による潤滑分子膜の膜厚分布定量観測
福澤 健二志牟田 太一中田 旭張 賀東三矢 保永
著者情報
ジャーナル フリー

70 巻 (2004) 700 号 p. 3479-3483

詳細
PDFをダウンロード (655K) 発行機関連絡先
抄録

A quantitative measurement method for two dimensional thickness distribution of molecularly thin lubricant films on magnetic disks is presented. Visualization of a molecularly thin film is an extremely useful technique for the investigation of replenishment and retention of thin lubricant films. We demonstrated ellipsometric microscopy using a white light source could provide improvement of signal to noise ratio of images in our previous works. However, measurement of absolute thickness of films has not been established, although the relative thickness can be obtained by intensity of images. In this report, method for measuring the absolute thickness of films has been presented. In this method, by using the relationship between the polarizer angle and the film thickness, the thickness measurement with a sub nm accuracy has been demonstrated.

著者関連情報
© 社団法人日本機械学会
前の記事 次の記事
feedback
Top