機能性マイクロツールのオンチップ作製と組み立てに関する研究(機械力学,計測,自動制御)

抄録

In this paper, we perform the on-chip assembly of microstructures with dimensions of 〜20μm. The fabrication method is proposed to polymerize the photo-crosslinkable resin to form the arbitrary shape by the illumination of patterned UV-ray through the mask on the microchip under a micro-scope. The polymerized micro-objects, which we call as "Microtools", can be used for the single cell analysis. By the proposed method, the microtools are fabricated at the desired place on the micro-chip in less than 1s. Additionally, the microtools are assembled by the laser manipulation on glass surface. The assembled microstructures are driven by the laser manipulation as rotational structures.