Denki Kagaku oyobi Kogyo Butsuri Kagaku
Online ISSN : 2434-2556
Print ISSN : 0366-9297
Technical Paper
Resistivity Lowering Limitations of Heavily Doped Polycrystalline Silicon
Yasuo WADAShigeru NISHIMATSU
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1979 Volume 47 Issue 2 Pages 118-123

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© 1979 The Electrochemical Society of Japan
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