Abstract
To use laser ablation for the removal of thin film without substrate-damage, we must decide suitable laser conditions which must be determined by the removed thickness-laser pulse width-laser intensity. We present a simple model based on heat transport which can provide the effective graph. We perfom the 30 ps-single pulse Nd: YAG laser irradiation with various laser intensities. The targets were used of 62.6-82.3 nm thick Ni coated on glass plane substrates. The irradiated surfaces of them are observed by an optical microscope, a scanning electron microscope, and a multiple beam interferometer. We find the suitable laser conditions in vacuum to be 6 × 1012-9 × 1012Wm-2-2 × 102-3 × 102Jm-2-3 × 10-4-5 × 10-4J, which correspond with the model.
